| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate temperature measurement system which eliminates the need of a large installation space in a chamber and does not affect thermal treatment of a substrate. <P>SOLUTION: A substrate temperature measurement system includes: multiple crystal oscillators 10 which are attached to a substrate for temperature measurement for measuring temperatures at multiple positions of the substrate for the temperature measurement placed on a thermal treatment plate; a sensor side antenna part 40 having multiple sensor side antennas provided near an end edge of the substrate for the temperature measurement so as to form a line and respectively connected with the multiple crystal oscillators 10; and a transmit-receive antenna part 50 having multiple transmit-receive antennas disposed in positions respectively facing the multiple sensor side antennas at a position on the outer side of the end edge of the substrate for the temperature measurement. <P>COPYRIGHT: (C)2013,JPO&INPIT |
