ION SOURCE

摘要

The purpose of the present invention is to provide an ion source from which highly pure polyvalent ions can be taken out. This ion source (10) comprises: a target (12) that, when irradiated with a laser (13), generates a plasma (14) in which the target is ionized into electrons and positive ions; a first power source (first voltage E1) that sets the electric potential of the target (12) higher than that of an acceleration channel (18), which is the target toward which the positive ions are emitted; and a second power source (second voltage E2) that sets the electric potential of a filter electrode (15), which is in the path over which the positive ions travel from the target (12) to the acceleration channel (18), higher than the electric potential of the target (12).