ELECTROSTATIC CHUCK AND SEMICONDUCTOR/LIQUID CRYSTAL MANUFACTURING EQUIPMENT

摘要

PURPOSE: An electrostatic chuck and an apparatus for manufacturing a semiconductor crystal are provided to improve the yield of an etching process on a wafer by securing the uniformity of a temperature on the wafer. CONSTITUTION: A wafer is loaded in a plurality of chuck regions. A chuck functioning unit(10) includes a concave part installed outside the chuck region and is bonded to a base plate(20) with an adhesive(26). An electrode(40) is arranged in the chuck functioning unit corresponding to the chuck region and the chuck functioning unit corresponding to the concave part. A plurality of lift pins(54) are arranged on the edge of an electrostatic chuck(1) to vertically move a tray(50). A focus ring(56) is installed on the outer side of the electrostatic chuck to limit plasma in the electrostatic chuck.