INTERFEROMETRIC PRESSURE SENSOR

摘要

An interferometric pressure sensor (1) comprises a measuring membrane body (2) having a measuring membrane having a first reflection surface (8) that can be deflected in relation to pressure; and an at least partially transparent counter body (3), wherein the measuring membrane body (2) is connected to the counter body (3) in a pressure-tight manner, wherein the counter body (3) has at least one second, partially reflective reflection surface (9) parallel to the first reflection surface at a pressure-dependent distance from the first reflection surface, wherein the counter body (3) has a third, partially reflective reflection surface (10) having a temperature-dependent distance from the second reflection surface, wherein the counter body (3) has a first, partially transparent partial body and a second partial body that is rigidly connected to the first partial body, wherein the first partial body has two boundary surfaces that are plane-parallel at least in some sections, of which a first boundary surface has the second reflection surface (9) and a second boundary surface has the third reflection surface (10), wherein the first reflection surface (8), the second reflection surface (9), and the third reflection surface (10) can be illuminated through the second partial body in perpendicular incidence.