VERTICAL ACTUATOR FOR ULTRA-PRECISION MOVING APPARATUS AND ULTRA-PRECISION MOVING APPARATUS HAVING THE SAME

摘要

PURPOSE: A vertical drive unit for a high accuracy transfer system and a high accuracy transfer system thereof are provided to implement vertical movement, to be miniaturized, and to provide a high stiffness property. CONSTITUTION: A vertical drive unit for a high accuracy transfer system(1) comprises an actuator(10), a first hinge member(20), a second hinge member(30), and a third hinge member(40). The actuator moves in the horizontal direction corresponding to a base(5). The first hinge member includes a first hinge connecting the base and one end of the actuator(21). The second hinge member comprises a lever member(35) which is arranged to be overlapped from the other end of the actuator toward the longitudinal direction of the actuator, a second hinge(31) connecting the lever member and the base and a third hinge(32) connecting the other end of the actuator and the lever member. The third hinge member comprises a body part(42) including a penetration part through which the actuator passes, a fourth hinge(43) connecting the body part with a motion stage, and a fifth hinge(45) connecting the body part with the lever member.