METHOD OF FABRICATING EMITTER WRAP THROUGH SOLAR CELL USING ONE-STEP DOPING PROCESS
摘要
Provided is a method of fabricating a selective EWT solar cell, including: a) forming via holes penetrating through opposing first and second surfaces of a p-type semiconductor substrate using laser; b) forming an anti-reflective film on the first surface of the semiconductor substrate, and forming a passivation film on the second surface of the semiconductor substrate; c) partially etching the passivation film so as to expose a part of the second surface on which an opening part of each of the via holes is formed; and d) heat-treating the semiconductor substrate under the presence of n-type impurity to dope the n-type impurity on the semiconductor substrate.
申请公布号
WO2013032255(A1)
申请公布日期
2013.03.07
申请号
WO2012KR06962
申请日期
2012.08.31
申请人
HANWHA CHEMICAL CORPORATION.;CHO, JAE EOCK;LEE, HONG GU;SEO, SE-YOUNG;HYUN, DEOC HWAN;LEE, YONG HWA;KIM, GANG IL;JUNG, WOO WON
发明人
CHO, JAE EOCK;LEE, HONG GU;SEO, SE-YOUNG;HYUN, DEOC HWAN;LEE, YONG HWA;KIM, GANG IL;JUNG, WOO WON