Continuous furnace of substrate processing system, has heating unit and gas supply unit that are formed inside the interior spaces

摘要

The furnace (1,1') has a division walls (4-6) that are formed in the interior spaces (7,8). The division walls are arranged separated from each other and from transport system (9,10). The heating unit (11,12) and gas supply unit (13,14) are formed inside the interior spaces. Independent claims are included for the following: (1) substrate processing system; and (2) method for processing substrate.