| 摘要 |
PURPOSE: A lithography apparatus, a substrate table, and a method for manufacturing a device are provided to easily guide radiation emitted by wavelength conversion materials to a detector through a semiconductor chip by burying a waveguide in the semiconductor chip. CONSTITUTION: An alignment sensor(AS) includes a semiconductor chip(2), wavelength conversion materials(4), and a waveguide(5). The semiconductor chip includes one or more windows to transmit radiation. The wavelength conversion materials are located on the window. The waveguide is buried in the semiconductor chip and receives the radiation emitted by the wavelength conversion materials. The waveguide includes a core(6) and a cladding(7) surrounding the core. The core has a higher refractive index than the cladding. |
