| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a management method of a manufacturing system, which is capable of automatically determining which quality an alarm has an influence on, by using a computer (server) to collect data and automatically analyze relationship between alarms and qualities. <P>SOLUTION: In the management method of a manufacturing system comprising a plurality of manufacturing devices, a server stores information such as information about contents of alarms, information identifying substrates, NG determination frequencies, OK determination frequencies, and NG occurrence ratios as collected, analyzed, and linked information in response to alarms from respective manufacturing devices, to recognize the relationship between contents of alarms and qualities, and a preliminarily set condition is defined as determination criteria to extract an alarm having a serious influence upon quality, and conveyance of substrates is controlled in accordance with the alarm. <P>COPYRIGHT: (C)2013,JPO&INPIT |
