LAYER SYSTEM HAVING A LAYER OF CARBON NANOTUBES ARRANGED PARALLEL TO ONE ANOTHER AND AN ELECTRICALLY CONDUCTIVE SURFACE LAYER, METHOD FOR PRODUCING THE LAYER SYSTEM, AND USE OF THE LAYER SYSTEM IN MICROSYSTEM TECHNOLOGY

摘要

The invention relates to a layer system, comprising a layer of carbon nanotubes oriented parallel to one another and a surface layer having metallic properties connected directly thereto, from which surface layer the carbon nanotubes have grown in tip growth. The layer system can also have a base layer and/or a substrate. The layer system can be obtained by producing a structured layer comprising a first phase, which is composed of a metal that has no independent catalytic activity with respect to the production of CNTs from the gas phase, and a second phase, which is composed of a metal that catalyzes the production of CNTs from the gas phase, on a substrate or a base layer, wherein the first phase has a structure that is unevenly thick and/or folded and optionally interspersed with pores and the second phase is located in recesses and/or pores of the first phase in such a way that the two material phases are at least partially adjacent to one another in the lateral plane, on the substrate or the base layer located thereon. Carbon is deposited on said structured layer from a gas atmosphere containing carbon, wherein carbon nanotubes are formed and said carbon nanotubes raise at least parts of the structured layer in a closed form. The substrate or the base layer can subsequently be removed. The layer system of the invention is suitable for use in a large number of components and electronic microsystems and nanosystems, flip-chip connections, sensors or actuators, in particular pressure sensors, contact sensors, optical sensors, mirrors, projectors, optical filters, nanopositioning systems, or interferometers, and, in a specific form, also in a super capacitor.