<p>A test object for testing a multiple beam system is provided. The test object includes multiple regions, each made up of multiple fields, each of which includes multiple sub-fields, each of which includes multiple structural elements. The location and number of sub-fields of at least one field corresponds to the number of beams of an array of beams of the multiple beam system and to an expected spatial relationship between the beams of the array of beams. Various scanning patterns can be applied in order to allow the array of beams to scan the entire field. Images of the subfields obtained using the multiple beam system are used to evaluate spatial or optical characteristics thereof.</p>
