发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 According to one embodiment, a semiconductor memory device includes a stacked body, a semiconductor pillar, a charge storage layer, a tunneling layer, a dividing trench and a first heating unit. The stacked body includes a plurality of first insulating films stacked alternately with a plurality of electrode films. The semiconductor pillar pierces the stacked body. The charge storage layer is provided between the electrode films and the semiconductor pillar. The tunneling layer is provided between the charge storage layer and the semiconductor pillar. The dividing trench is provided between the semiconductor pillars in one direction orthogonal to a stacking direction of the stacked body to divide the electrode films. The first heating unit is provided in an interior of the dividing trench.
申请公布号 US2013058163(A1) 申请公布日期 2013.03.07
申请号 US201213418651 申请日期 2012.03.13
申请人 KITO MASARU;FUJIWARA TOMOKO;AOCHI HIDEAKI;KABUSHIKI KAISHA TOSHIBA 发明人 KITO MASARU;FUJIWARA TOMOKO;AOCHI HIDEAKI
分类号 G11C11/34;H01L29/78 主分类号 G11C11/34
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