| 摘要 |
<P>PROBLEM TO BE SOLVED: To determine a position of a detection system for detecting a position of a mark above an object with high accuracy. <P>SOLUTION: A holding apparatus comprises: force generators 122a - 122c, 124a, and 102 and driving devices 102, 126. The force generators can generate magnetic suction force and static pressure of gas between a detection system AL2<SB POS="POST">4</SB>provided below an FIA surface plate 102 and the surface plate so that a predetermined clearance is formed between the detection system and the surface plate. The driving units 102, 126 drive, in a state having the clearance (levitation state), the detection system at least in an uniaxial direction in a horizontal plane. Consequently, the detection system is not in contact with the surface plate and can make a move (positioning) with high accuracy. Moreover, when attractive force is set to be greater than repulsive force generated by the force generator, the detection system can be fixed (landed) with highly accurate positioning. <P>COPYRIGHT: (C)2013,JPO&INPIT |
