METHOD FOR FORMING A CAPACITOR DIELECTRIC AND METHOD FOR MANUFACTURING A CAPACITOR USING THE CAPACITOR DIELECTRIC

摘要

A method for forming a capacitor dielectric includes depositing a zirconium oxide layer, performing a post-treatment on the zirconium oxide layer such that the zirconium oxide layer has a tetragonal phase, and depositing a tantalum oxide layer over the zirconium oxide layer such that the tantalum oxide layer has a tetragonal phase.