METHOD AND DEVICE FOR INSPECTING SPATIAL LIGHT MODULATOR, AND EXPOSURE METHOD AND DEVICE

摘要

A method for inspecting a spatial light modulator, comprising: performing control so that in a region to be inspected in a mirror element array, mirror elements in a first state in which the amount of phase change with respect to incident light is zero and mirror elements in a second state in which the amount of phase change with respect to incident light is 180° (p) are arranged in a checkerboard pattern; guiding light that has passed through the region to be inspected into a projection optical system having a resolution limit that is coarser than the width of an image from one mirror element, and forming a spatial image; and inspecting the characteristics of the spatial light modulator from the spatial image. It is thereby possible to readily inspect the characteristics of a spatial light modulator having an array of a plurality of optical elements.