| 发明名称 |
PRODUCTION METHOD FOR ZINC OXIDE THIN FILM, AND DEVICE |
| 摘要 |
<p>A production method for a zinc oxide thin film, having a step in which a basic solution of at least pH10 and containing a tetrahydroxozincate (II) ion is prepared, a step in which the basic solution is coated on a substrate, and a step in which the basic solution is heated.</p> |
| 申请公布号 |
WO2013031782(A1) |
申请公布日期 |
2013.03.07 |
| 申请号 |
WO2012JP71732 |
申请日期 |
2012.08.28 |
| 申请人 |
NIKON CORPORATION;NISHI YASUTAKA;NAKAZUMI MAKOTO;TAKI YUSUKE |
发明人 |
NISHI YASUTAKA;NAKAZUMI MAKOTO;TAKI YUSUKE |
| 分类号 |
C01G9/02 |
主分类号 |
C01G9/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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