发明名称 METHOD AND APPARATUS FOR PRINTING A MULTILAYER PATTERN
摘要 PURPOSE: A method and apparatus for printing a multilayer pattern are provided to prevent misalignment of a plurality of printed layers by minimizing errors in a printing process. CONSTITUTION: A first patterned layer(500) is deposited on a surface of a first substrate in a first printing process. A second patterned layer(502) is deposited on the surface of the first substrate or the first patterned layer in a second printing process. A first optical image(504) of the first patterned layer is obtained between the first printing process and the second printing process. A second optical image(506) of the second patterned layer is obtained after the second printing process. A first extracted optical image(508) is formed by extracting the first optical image from the second optical image.
申请公布号 KR20130023179(A) 申请公布日期 2013.03.07
申请号 KR20120093597 申请日期 2012.08.27
申请人 APPLIED MATERIALS ITALIA S.R.L. 发明人 VERCESI TOMMASO;MARCHI ENRICO BOSCOLO
分类号 H01L31/042;H01L31/18 主分类号 H01L31/042
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