发明名称 |
METHOD AND APPARATUS FOR PRINTING A MULTILAYER PATTERN |
摘要 |
PURPOSE: A method and apparatus for printing a multilayer pattern are provided to prevent misalignment of a plurality of printed layers by minimizing errors in a printing process. CONSTITUTION: A first patterned layer(500) is deposited on a surface of a first substrate in a first printing process. A second patterned layer(502) is deposited on the surface of the first substrate or the first patterned layer in a second printing process. A first optical image(504) of the first patterned layer is obtained between the first printing process and the second printing process. A second optical image(506) of the second patterned layer is obtained after the second printing process. A first extracted optical image(508) is formed by extracting the first optical image from the second optical image. |
申请公布号 |
KR20130023179(A) |
申请公布日期 |
2013.03.07 |
申请号 |
KR20120093597 |
申请日期 |
2012.08.27 |
申请人 |
APPLIED MATERIALS ITALIA S.R.L. |
发明人 |
VERCESI TOMMASO;MARCHI ENRICO BOSCOLO |
分类号 |
H01L31/042;H01L31/18 |
主分类号 |
H01L31/042 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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