发明名称 Semiconductor device and method for manufacturing the same
摘要 <p>A semiconductor device comprises an MIS field effect transistor including a channel region made of p-conductive silicon, a gate insulating film including a first insulating film having dielectric constant higher than dielectric constant of silicon dioxide, and a gate electrode. The gate electrode includes a first metal film formed on the gate insulating film and having a work function greater than a work function of intrinsic semiconductor silicon, and a p-conductive silicon film formed on the first metal film and in contact with the first metal film.</p>
申请公布号 EP2565929(A2) 申请公布日期 2013.03.06
申请号 EP20120179171 申请日期 2012.08.03
申请人 ELPIDA MEMORY, INC. 发明人 SAINO, KANTA
分类号 H01L29/51;H01L21/28;H01L21/8234;H01L21/8238;H01L27/108;H01L29/49;H01L29/66;H01L29/78 主分类号 H01L29/51
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