METHOD OF ELECTROCHEMICAL ELECTRODE USING SURFACE TREATMENT OF POLYIMIDE FILM BY LASER IRRADIATION AND SENSOR DEVICE USED BY THE METHOD

摘要

PURPOSE: A manufacturing method of an electrode for electrochemistry of a polyimide using laser surface treatment and a sensor element using the same are provided to manufacture the electrode of electrochemistry or the sensor element through evaporation of a platinum and a microscopic surface structure generated through the surface treatment of irradiating pulses of UV laser on the polyimide. CONSTITUTION: A manufacturing method of an electrode for electrochemistry comprises a step of intermittently irradiating a pulse laser on the surface of a polyimide film; a step of regularly generating a conical-shaped microscopic structure; and a step of treating the surface by evaporating the surface of the polyimide including a structure with platinum. The pulse laser intensity is changed to 5 mJ/cm2 or 15 mJ/cm2. The number of vibration of the laser is 20,000-50,000 Hz. The conical-shaped microscopic structure includes a shape in which a part of the polyimide film is split and protrudes towards an upper side. The pulse laser is intermittently irradiated 3-7 times after irradiating 20-30 ns on the polyimide surface.