SEPARATION CONTROL SUBSTRATE/TEMPLATE FOR NANOIMPRINT LITHOGRAPHY
摘要
<p>Control of lateral strain and lateral strain ratio (dt/db) between template and substrate through the selection of template and/or substrate thicknesses (Tt and/or Tb), control of template and/or substrate back pressure (Pt and/or Pb), and/or selection of material stiffness are described.</p>
申请公布号
EP2564271(A1)
申请公布日期
2013.03.06
申请号
EP20110720225
申请日期
2011.04.27
申请人
MOLECULAR IMPRINTS, INC.
发明人
IM, SE-HYUK;GANAPATHISUBRAMANIAN, MAHADEVAN;FLETCHER, EDWARD B.;KHUSNATDINOV, NIYAZ;SCHMID, GERARD;MEISSL, MARIO JOHANNES;CHERALA, ANSHUMAN;XU, FRANK Y.;CHOI, BYUNG-JIN;SREENIVASAN, SIDLGATA V.
