ULTRA-PRECISION MOVING APPARATUS

摘要

PURPOSE: An ultra-precision transfer system is provided to secure load resistance and to reduce a size thereof by implementing 6-degrees of freedom with a parallel device method of a dual triangular structure. CONSTITUTION: A stage moves to a base with 6 degrees of freedom. Three horizontal driving units(31,33,35) connect the base to the stage and are regularly arranged. The three horizontal driving units implement the in-plane motion of 3-degrees of freedom of the stage. Three vertical driving units(21,23,25) are arranged in parallel to three horizontal driving units and implement the out-plane motion of 3-degrees of freedom of the stage. Three horizontal driving units and three vertical driving units have a dual triangular structure.