| 摘要 |
PURPOSE: An apparatus for manufacturing a light emitting device is provided to improve the quality of a light emitting device by uniformizing the flow density of gas. CONSTITUTION: A first axis(130) is arranged in a chamber(110). A carrier(120) is connected to one region of the first axis in the chamber. The carrier includes one or more substrate fixing units to fix a growth substrate(170). Gas is supplied to the chamber through a gas supply path(140). A gas injection unit(150) is connected to the gas supply path and injects the gas to the chamber. A heating device(160) provides thermal energy to reaction gas and carrier gas injected to the gas injecting unit.
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