| 摘要 |
PURPOSE: A composite ion analyzer is provided to reduce the test time by analyzing and measuring the ion energy in real time using the ion time-of-flight. CONSTITUTION: A composite ion analyzer(100) comprise a flash generating member(5), a Thomson parabola ion analyzer, and an ion time-of-flight analyzer. The flash generating member selectively passes only some ion to an ion source(4). The Thomson parabola ion analyzer measures the distance that the ion passing the flash generating member is deviated by the electromagnetic field. The ion time-of-flight analyzer measures the time-of-flight of the ion using the flash generated by the ion colliding with the flash generating member. The flash generating member comprises a first through-hole. Some ion of the ion source passes the first through-hole. |
