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发明名称
METHOD OF FORMING MEMORY CELL USING GAS CLUSTER ION BEAMS
摘要
申请公布号
EP2393957(B1)
申请公布日期
2013.03.06
申请号
EP20100702188
申请日期
2010.01.26
申请人
MICRON TECHNOLOGY, INC.
发明人
SMYTHE, JOHN
分类号
C23C14/22;G11C16/02;H01L27/24;H01L45/00
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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