Method and system of fabricating PZT nanoparticle ink based piezoelectric sensor

摘要

The disclosure provides in one embodiment a method of fabricating a lead zirconate titanate (PZT) nanoparticle ink based piezoelectric sensor (110). The method has a step of formulating a lead zirconate titanate (PZT) nanoparticle ink (104). The method further has a step of depositing the PZT nanoparticle ink (104) onto a substrate (101) via an ink deposition process (122) to form a PZT nanoparticle ink based piezoelectric sensor (110).