LOW RESISTANCE CONDUCTIVE LINE, THIN FILM TRANSISTOR, THIN FILM TRANSISTOR PANEL AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A low resistance wire, a thin film transistor, a thin film transistor display plate, and manufacturing methods thereof are provided to prevent discoloration of a source electrode and a drain electrode due to reaction with oxygen or sulfur in a protection layer etching process by forming a capping layer with large density. CONSTITUTION: A source electrode(173) faces a drain electrode(175) on a substrate(110). A capping layer(179) is formed on the sidewall and surfaces of the source electrode and the drain electrode. A protection layer(180) is formed on the source electrode and the drain electrode. A contact hole passes through the protection layer and a gate insulation layer(124). A pixel electrode is electrically connected to the drain electrode through the contact hole.