| 摘要 |
PURPOSE: A solar cell and a manufacturing method thereof are provided to prevent a device defect of the solar cell due to high temperature by annealing a metal layer and a metal oxide layer at 300 to 1200 degrees centigrade. CONSTITUTION: A metal layer(170) is formed on the upper side of a semiconductor substrate(110). A metal oxide layer(180) is formed on the upper side of the metal layer. A front electrode(190) is formed on the upper side of the metal oxide layer. A metal-silicide layer(170a) is formed between the metal layer and the semiconductor substrate. A rear electrode is formed on the rear of the semiconductor substrate. |
