TUNABLE CAVITY RESONATOR AND METHOD OF FABRICATING SAME
摘要
An example tunable cavity resonator for filtering radiation in the optical and IR wavelengths and an example method for fabricating same. The example resonator includes a pair of reflectors, one in fixed relationship to a substrate and the other formed upon a suspended moveable membrane disposed a cavity length from the one reflector. The resonator also includes a pair of spaced apart electrodes either constituted by the reflectors or juxtaposed therewith, which are electrostatically operable to move the membrane and other reflector relative to the one reflector.
申请公布号
EP1488483(A4)
申请公布日期
2013.03.06
申请号
EP20030706132
申请日期
2003.03.10
申请人
THE UNIVERSITY OF WESTERN AUSTRALIA
发明人
ANTOSZEWSKI, JAREK;DELL, JOHN, MARCEL;FARAONE, LORENZO;MUSCA, CHARLES, ANTHONY;WINCHESTER, KEVIN, JAMES