COOLING APPARATUS OF PHOTOMASK CLEANING EQUIPMENT

摘要

PURPOSE: A cooling device of a photomask cleaning apparatus is provided to shorten moving time from a current process to the following process by forcedly dropping the temperature of a photomask. CONSTITUTION: A chamber(2510) is divided into a processing region and a utility region by a base plate(2520). A cooling module(2530) is installed on the upper side of the base plate. The cooling module includes a first support frame(2532), a second support frame(2534), a cooling plate(2540), lift pins(2550), and a space partition cover(2536). The first support frame is separated from the second support frame. The cooling plate is installed in the first support frame and the second support frame. The lift pins are located under the cooling plate.