发明名称 EXHAUST APPARATUS
摘要 PURPOSE: An exhaust system is provided to reduce time of inputting or outputting a heater by removing a vacuum release process when the heater is inputted or outputted. CONSTITUTION: A pipe body(310) has various shapes with an inner space. A separation pipe(321) has an additional inner space separated from an inner space of the pipe body. An opening and closing unit(330) opens or closes a first open part(310a) of the pipe body and a second open part of the separation pipe. A thermal diffusion member(322) is installed along the outer side of the separation tube. A heater(323) heats the separation pipe, the thermal diffusion member, and the pipe body.
申请公布号 KR101239148(B1) 申请公布日期 2013.03.06
申请号 KR20110071520 申请日期 2011.07.19
申请人 发明人
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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