VACCUM VAPOR DEPOSITION APPARATUS USING SOLAR ENERGY

摘要

PURPOSE: A vacuum vapor depositing apparatus using a parabolic sunlight collecting unit is provided to improve sunlight collecting efficiency by including a sun tracking function to move the sunlight collecting unit according to the movement of the Sun. CONSTITUTION: A vacuum line(200) maintains a preset vacuum degree in a chamber(100). One or more transmission windows(300) are formed on the outer side of the chamber. A parabolic sunlight collecting unit(400) collects sunlight and transmits the sunlight to the chamber via the transmission window. The sunlight collecting unit includes a sun tracking function to move according to the movement of the Sun. A substrate holder(500) is formed in the chamber. A source container(600) is formed under the substrate holder in the chamber.