发明名称 Auto device skew manufacturing
摘要 A system and method for manufacturing semiconductor devices is disclosed. An embodiment comprises using desired device parameters to choose an initial manufacturing recipe. Once chosen, the initial manufacturing recipe may be modified by determining and applying an offset adjustment based on previous manufacturing to tune the recipes for the particular equipment to be utilized in the manufacturing process.
申请公布号 US8391999(B2) 申请公布日期 2013.03.05
申请号 US20100797392 申请日期 2010.06.09
申请人 CHEN JUI-LONG;CHAO HUI-YUN;HO CHIA-TONG;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHEN JUI-LONG;CHAO HUI-YUN;HO CHIA-TONG
分类号 D06F19/00 主分类号 D06F19/00
代理机构 代理人
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