EVAPORATION SOURCE FOR LARGE SCALE DEPOSITION USING PARALLEL CONNECTION OF POINT SOURCE

摘要

PURPOSE: A large area evaporation source is provided to improve the uniformity of a thin film by using a common electrode block for controlling the position of point evaporation sources. CONSTITUTION: A common electrode block is connected to a positive pole(100) and a negative pole(110) of an external power supply apparatus. Point evaporation sources are parallelly connected to the common electrode block. The point evaporation sources are arranged at a regular interval. A cooling water line is installed in the common electrode block. A connection groove controls the arrangement of the point evaporation sources.