发明名称 Semiconductor integrated circuit device having MIM capacitor and method of fabricating the same
摘要 In a semiconductor integrated circuit device and a method of formation thereof, a semiconductor device comprises: a semiconductor substrate; an insulator at a top portion of the substrate, defining an insulator region; a conductive layer pattern on the substrate, the conductive layer pattern being patterned from a common conductive layer, the conductive layer pattern including a first pattern portion on the insulator in the insulator region and a second pattern portion on the substrate in an active region of the substrate, wherein the second pattern portion comprises a gate of a transistor in the active region; and a capacitor on the insulator in the insulator region, the capacitor including: a lower electrode on the first pattern portion of the conductive layer pattern, a dielectric layer pattern on the lower electrode, and an upper electrode on the dielectric layer pattern.
申请公布号 US8389355(B2) 申请公布日期 2013.03.05
申请号 US20110984823 申请日期 2011.01.05
申请人 WON SEOK-JUN;PARK JUNG-MIN;SAMSUNG ELECTRONICS CO., LTD. 发明人 WON SEOK-JUN;PARK JUNG-MIN
分类号 H01L21/8234 主分类号 H01L21/8234
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