发明名称 |
Oxide sintered body, target, transparent conductive film obtained by using the same, and transparent conductive substrate |
摘要 |
An oxide sintered body having zinc oxide as a main component and containing magnesium, and a transparent conductive substrate are provided, and an oxide sintered body having zinc oxide and magnesium, wherein content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Mg); an oxide sintered body having zinc oxide, magnesium, gallium and/or aluminum, wherein content of gallium and/or aluminum is over 0 and equal to or lower than 0.09 as atom number ratio of (Ga+Al)/(Zn+Ga+Al), and content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Ga+Al+Mg); a target obtained by processing these oxide sintered bodies; and a transparent conductive film formed on a substrate by a sputtering method or an ion plating method, by using this target.
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申请公布号 |
US8389135(B2) |
申请公布日期 |
2013.03.05 |
申请号 |
US20070226874 |
申请日期 |
2007.05.11 |
申请人 |
NAKAYAMA TOKUYUKI;ABE YOSHIYUKI;SUMITOMO METAL MINING CO., LTD. |
发明人 |
NAKAYAMA TOKUYUKI;ABE YOSHIYUKI |
分类号 |
B32B15/04;C04B35/04;C04B35/10;C04B35/453 |
主分类号 |
B32B15/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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