发明名称 |
Retaining ring with shaped profile |
摘要 |
Retaining rings with curved surfaces are described. The curved surfaces prevent damage to a fixed abrasive polishing pad when the retaining ring is used in a polishing process. The curved surfaces are on the bottom surface of the ring, such as along the outer diameter and/or along the sidewalls of channels formed in the bottom of the ring. |
申请公布号 |
US8388412(B2) |
申请公布日期 |
2013.03.05 |
申请号 |
US201113269488 |
申请日期 |
2011.10.07 |
申请人 |
PRABHU GOPALAKRISHNA B.;YUAN YIN;OH JEONGHOON;MENK GREGORY E.;APPLIED MATERIALS, INC. |
发明人 |
PRABHU GOPALAKRISHNA B.;YUAN YIN;OH JEONGHOON;MENK GREGORY E. |
分类号 |
B24B1/00 |
主分类号 |
B24B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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