SUBSTRATE COATED CARBON NANOTUBE(CNT) AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A carbon nanotube coated substrate which is surface-treated with a silazane material and a manufacturing method thereof are provided to prevent a base substrate from being damaged by surface treating the base substrate with a silazane material which is the same with hexamethyldisilazane and forming a carbon nanotube conductive film. CONSTITUTION: A surface treating film(14) of a silazane material is formed on the surface of a base substrate(12). A carbon nanotube conductive film(16) is formed on the surface treating film. The silazane material includes hexamethylsilazane.