发明名称 Methods of manufacturing a hybrid electrical contact
摘要 Techniques for manufacturing an electronic device. In certain embodiments, a substrate includes a lower patterned layer that has a target conductor. A hybrid-vertical contact may be disposed directly on the target conductor. The hybrid vertical contact may include a lower-vertical contact directly on the target conductor and an upper-vertical contact directly on the lower-vertical contact. The upper-vertical contact may have an upper width that is greater than a lower width of the lower-vertical contact.
申请公布号 US8389373(B2) 申请公布日期 2013.03.05
申请号 US20100970694 申请日期 2010.12.16
申请人 DOEBLER JONATHAN;MICRON TECHNOLOGY, INC. 发明人 DOEBLER JONATHAN
分类号 H01L21/20 主分类号 H01L21/20
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