Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
摘要
The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.
申请公布号
US8387635(B2)
申请公布日期
2013.03.05
申请号
US20070820709
申请日期
2007.06.20
申请人
COLLINS JIMMY D.;DEKRAKER DAVID;GAST TRACY A.;ROSE ALAN D.;TEL FSI, INC.
发明人
COLLINS JIMMY D.;DEKRAKER DAVID;GAST TRACY A.;ROSE ALAN D.
