发明名称 |
Method and apparatus for cathodic arc ion plasma deposition |
摘要 |
A method and apparatus for depositing a coating material on a surface of a substrate by an ion plasma deposition process using a hollow cathode is disclosed. The cathode may be a substantially cylindrical hollow cathode. A plasma arc is formed on the outer circumference of the cathode to remove coating material from the cathode, which is then deposited on a surface of a substrate. An internal arc drive magnet is contained within the hollow bore of the cathode and cooling is provided to the magnet during operation. |
申请公布号 |
US8387561(B2) |
申请公布日期 |
2013.03.05 |
申请号 |
US20100965054 |
申请日期 |
2010.12.10 |
申请人 |
WEAVER SCOTT ANDREW;CARTER WILLIAM THOMAS;MARRUSO PAUL MARIO;GENERAL ELECTRIC COMPANY |
发明人 |
WEAVER SCOTT ANDREW;CARTER WILLIAM THOMAS;MARRUSO PAUL MARIO |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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