| 摘要 |
PURPOSE: A susceptor for manufacturing semiconductor and an epitaxial growth apparatus including the same are provided to reduce the time for changing the susceptor by adjusting two through holes. CONSTITUTION: A first body(210) includes first through holes(214). A second body(220) accommodates the first main body. A second body includes second through holes and a mounting groove. The mounting groove includes a bottom surface and a sidewall.
|
