| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a detector which can reduce an ionic feedback and maintain a detection sensitivity. <P>SOLUTION: In a detector utilizing gas electron multiplication, a photodetector 1 includes: a plurality of through holes 8A regularly arranged along one direction on a surface 9A; a planar electrode 3A which forms an electric field for generating an electron multiplication region; a planar electrode 3B arranged in parallel with the planar electrode 3A, having a plurality of through holes 8B regularly arranged along one direction, which forms the electric field for generating the electron multiplication region in gas; and an anode 5 arranged facing the planar electrode 3B at the opposite side of the planar electrode 3A and which extracts electrons multiplied in the electron multiplication region. A diameter of the through hole 8A is smaller than that of the through hole 8B, and a central position of the through hole 8A is shifted along one direction relative to the central position of the through hole 8B. <P>COPYRIGHT: (C)2013,JPO&INPIT |
