PHOTOELECTRIC CONVERSION ELEMENT AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a photoelectric conversion element having a quantum dot array where quantum dots are arranged regularly and three-dimensionally, and to provide a manufacturing method therefor.

SOLUTION: The manufacturing method of a photoelectric conversion element having a three-dimensional quantum dot array includes a laminate formation step for forming a laminate having a plurality of laminated tunnel junction semiconductor layers, a patterning step for forming a protrusion and recess pattern having multiple protrusions for quantum dots on the upper surface of the laminate, and a trench formation step for forming trenches penetrating the plurality of semiconductor layers by cutting the recesses formed in the patterning step. A photoelectric conversion element manufactured by the manufacturing method is also provided.

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