CAPACITIVE TRANSDUCER, METHOD FOR MANUFACTURING THE SAME, AND OPERATING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a capacitive transducer and a method for manufacturing the same and an operating method thereof.

SOLUTION: The transducer includes: a first doping area 20; a second doping area 30 of a type opposite to that of the first doping area 20 and includes a first oscillation part 32; and a space 60 disposed between the first doping area and the first oscillation part 32. The first and second doping areas 20, 30 are integrated with each other. The first oscillation part includes a plurality of through holes 40, and a material film 50 sealing the through holes 40 is disposed on the oscillation part.

COPYRIGHT: (C)2013,JPO&INPIT