| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic microscope which can transmit an ultrasonic wave of a high frequency to a specimen and observe the inside of the specimen at a high spatial resolution. <P>SOLUTION: An ultrasonic microscope 1a for generating an ultrasonic wave by pulse light so as to irradiate a specimen with the ultrasonic wave and observing the specimen using a reflection ultrasonic wave reflected by the specimen includes pulse light emission means 5 for emitting the pulse light and an ultrasonic wave transmission part 4a for emitting the ultrasonic wave due to a thermoelastic effect by absorbing the emitted pulse light and transmitting the ultrasonic wave to the specimen. An ultrasonic wave reception part 6a receives a reflection ultrasonic wave which is the ultrasonic wave reflected by the specimen and changes a quantum characteristic according to a stress received from the reflection ultrasonic wave. Characteristic change detection means 7a provided in the ultrasonic microscope 1a detects a change of the quantum characteristic of the ultrasonic wave reception part 6a. Further, internal information acquisition means 8 provided in the ultrasonic microscope 1a obtains information on the inside of the specimen based on a change of the detected quantum characteristic and observes the distribution of a state in a three dimensional direction inside the specimen. <P>COPYRIGHT: (C)2013,JPO&INPIT |
