MOLD, IMPRINT DEVICE, IMPRINT METHOD, AND ARTICLE PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique useful to an imprint method for precisely forming a pattern.

SOLUTION: A mold used for imprinting includes a pattern part which has a pattern surface, a base which is coupled to a mold holder, and a coupling part which couples the pattern part and base to each other. The coupling part is constituted in such a way that the mold has larger rigidity in a direction orthogonal to the pattern surface than in a direction parallel with the pattern surface.

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