RADIATION DETECTOR, MANUFACTURING METHOD OF RADIATION DETECTOR, RADIATION IMAGE PHOTOGRAPHING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent electrostatic breakdown of a photoelectric conversion element, and improve adhesion of a light-emitting layer and a photoelectric conversion substrate.

SOLUTION: A radiation detector 10A includes: a TFT switch 4 formed on a substrate 1; a semiconductor layer 6 formed on the substrate 1 as a photoelectric conversion element that generates charge corresponding to light radiated thereon; a planarized layer 34 formed on the semiconductor layer 6; an antistatic layer 32 formed in a mesh shape on the planarized layer 34; and a scintillator 70 which is formed on the planarized layer 34 and the antistatic layer 32 and emits light corresponding to the radiated radiation.

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