发明名称 |
DIELECTRIC ISOLATION SUBSTRATE AND SEMICONDUCTOR DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dielectric isolation substrate and a semiconductor device that allow easy formation of a deep impurity diffusion layer. <P>SOLUTION: In a dielectric isolation substrate 10, an insulating film 12 having a first thickness t1 is provided on a semiconductor substrate 11. A semiconductor layer 13 of a first conductivity type having a second thickness t2 is provided on the insulating film 12. An impurity diffusion layer 14 of a second conductivity type is partially provided in contact with the insulating film 12 at a lower portion of the semiconductor layer 13. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013045833(A) |
申请公布日期 |
2013.03.04 |
申请号 |
JP20110181489 |
申请日期 |
2011.08.23 |
申请人 |
TOSHIBA CORP |
发明人 |
WADA RYU;YOSHIOKA KAORI;YASUHARA NORIO;MATSUDAI TOMOKO;GOTO YUICHI |
分类号 |
H01L21/02;H01L21/336;H01L21/76;H01L21/762;H01L27/12;H01L29/786;H01L29/861;H01L29/868 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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