发明名称 DIELECTRIC ISOLATION SUBSTRATE AND SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a dielectric isolation substrate and a semiconductor device that allow easy formation of a deep impurity diffusion layer. <P>SOLUTION: In a dielectric isolation substrate 10, an insulating film 12 having a first thickness t1 is provided on a semiconductor substrate 11. A semiconductor layer 13 of a first conductivity type having a second thickness t2 is provided on the insulating film 12. An impurity diffusion layer 14 of a second conductivity type is partially provided in contact with the insulating film 12 at a lower portion of the semiconductor layer 13. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013045833(A) 申请公布日期 2013.03.04
申请号 JP20110181489 申请日期 2011.08.23
申请人 TOSHIBA CORP 发明人 WADA RYU;YOSHIOKA KAORI;YASUHARA NORIO;MATSUDAI TOMOKO;GOTO YUICHI
分类号 H01L21/02;H01L21/336;H01L21/76;H01L21/762;H01L27/12;H01L29/786;H01L29/861;H01L29/868 主分类号 H01L21/02
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