| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve both overlay accuracy and productivity in a drawing device for performing drawing to a plurality of shot regions in parallel on a substrate arranged in a predetermined direction. <P>SOLUTION: A drawing device for performing drawing with an array of a charged particle beam includes: a stage for holding a substrate; a charged particle optical system; driving means for performing relative displacement in a predetermined direction between the stage and the charged particle optical system so as to change a drawing region on the substrate; and control means. The charged particle optical system includes a plurality of deflectors which make a plurality of subarrays discretely arranged with space in the predetermined direction incident on the substrate and respectively deflect a plurality of subarray sets. The control means controls the charged particle optical system and the driving means so that a region on one side of a boundary of the plurality of shot regions and a region on the other side of the boundary are not drawn in parallel by the subarrays crossing the boundary and sequentially drawn through step movement. <P>COPYRIGHT: (C)2013,JPO&INPIT |
