| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a burn-in system and a burn-in method capable of guaranteeing that a semiconductor wafer has been burned-in under a correct condition without inspecting a wafer for burn-in at each burn-in. <P>SOLUTION: The burn-in system includes a semiconductor wafer which contains a plurality of chip regions 40 where an integrated circuit 41 is formed, and a burn-in wafer which supplies a predetermined voltage and a burn-in signal to the semiconductor wafer under a condition in which it is laminated to the semiconductor wafer. The semiconductor wafer includes a plurality of test circuits 42 formed in association with the integrated circuit 41. The test circuit 42 is supplied with a burn-in signal and a predetermined voltage supplied to a corresponding integrated circuit 41. The test circuit 42 includes a burn-in history element which, when burn-in is correctly performed, represents a state different from that before execution of burn-in while holding the state. <P>COPYRIGHT: (C)2013,JPO&INPIT |
